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崔海宁, 李薇, 任延志, 汪冬梅, 席时权. 红外椭圆偏振光谱及其应用[J]. 分析测试技术与仪器, 1998, (3): 129-137.
引用本文: 崔海宁, 李薇, 任延志, 汪冬梅, 席时权. 红外椭圆偏振光谱及其应用[J]. 分析测试技术与仪器, 1998, (3): 129-137.
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Cui Haining, Li Wei, Ren Yanzhi, Wang Dongmei, Xi Shiquan. Spectroscopic Infrared Ellipsometry and Its Application[J]. Analysis and Testing Technology and Instruments, 1998, (3): 129-137.
Citation: Cui Haining, Li Wei, Ren Yanzhi, Wang Dongmei, Xi Shiquan. Spectroscopic Infrared Ellipsometry and Its Application[J]. Analysis and Testing Technology and Instruments, 1998, (3): 129-137.
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红外椭圆偏振光谱及其应用

Spectroscopic Infrared Ellipsometry and Its Application

    摘要
  • 摘要: 阐述了红外椭圆偏振光谱(Spectroscopic Infrared Elipsometry,简称SIRE)的原理、技术和发展.对国外SIRE的应用做了介绍并给出部分实例.共收集文献29篇.

     

    Abstract: The principle, technology and developement of spectroscopic infrared ellipsometry(SIRE) are introduced. Several given application examples show that such SIRE is an effective technical method in surface and thin film measurement. It covers 29 reference papers.

     

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