彭宇, 张之恒, 安婷, 钱匡亮. 导电环氧树脂消除扫描电子显微镜图像荷电问题的原理与实践[J]. 分析测试技术与仪器, 2022, 28(2): 125-131. DOI: 10.16495/j.1006-3757.2022.02.003
引用本文: 彭宇, 张之恒, 安婷, 钱匡亮. 导电环氧树脂消除扫描电子显微镜图像荷电问题的原理与实践[J]. 分析测试技术与仪器, 2022, 28(2): 125-131. DOI: 10.16495/j.1006-3757.2022.02.003
PENG Yu, ZHANG Zhi-heng, AN Ting, QIAN Kuang-liang. Principle and Practice of Conductive Epoxy Resin to Eliminate Charging Problem in Scanning Electron Microscope Images[J]. Analysis and Testing Technology and Instruments, 2022, 28(2): 125-131. DOI: 10.16495/j.1006-3757.2022.02.003
Citation: PENG Yu, ZHANG Zhi-heng, AN Ting, QIAN Kuang-liang. Principle and Practice of Conductive Epoxy Resin to Eliminate Charging Problem in Scanning Electron Microscope Images[J]. Analysis and Testing Technology and Instruments, 2022, 28(2): 125-131. DOI: 10.16495/j.1006-3757.2022.02.003

导电环氧树脂消除扫描电子显微镜图像荷电问题的原理与实践

Principle and Practice of Conductive Epoxy Resin to Eliminate Charging Problem in Scanning Electron Microscope Images

  • 摘要: 荷电问题常造成扫描电子显微镜(SEM)图像上产生亮度不均、条纹等伪影. 提出一种利用导电环氧树脂镶嵌样品以消除SEM图像荷电的方法, 并与传统导电胶粘贴制样方法对1 000 ℃高温混凝土、瓷土与河南双槐树考古土三种样品的适应性进行了对比研究. 结果表明, 利用铜粉与环氧树脂混合制备导电环氧树脂并将样品镶嵌其中所制备样品的SEM图像基本无荷电问题, 而传统导电胶粘贴方法所制备样品的SEM图像存在较严重的荷电问题, 通过增加导电层厚度并不能对此进行改善, 且易造成微纳结构被掩盖. 最后对传统制样方法导致荷电问题的原因与导电环氧树脂对荷电问题的改善原理进行了分析.

     

    Abstract: Charging problem often causes the artifacts such as uneven brightness, stripes, etc. on scanning electron microscopic (SEM) images. A method was proposed to eliminate the charging problems of samples with lower strength and porous loose structures by impregnating the samples in the conductive epoxy resin. The adaptability of this solution and the conventional method for the three lower strength and porous loose structural samples, namely the fiber reinforced concrete exposing to high temperature of 1 000 ℃, ceramic soil and archology soil of Henan Shuanghuaishu archeological site, were comparatively studied. The results showed that samples impregnated in the copper powder mixed conductive epoxy resin can effectively eliminate the charging problem induced artifacts of the SEM images. While, samples prepared by the traditional method showed severely charging artifacts. By improving the thickness of conductive layer not only can not reduce the charging problem, but also cover the nano- and micro-structure. The causes of the charging problem caused by the traditional sample preparation method and the improvement principle of the conductive epoxy resin on the charging problem were analyzed.

     

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