模拟空间原子氧辐照下<i>X</i>射线光电子能谱仪的原位表征功能开发

刘建; 剡珍; 郝俊英; 刘维民

doi:10.16495/j.1006-3757.2023.01.006

模拟空间原子氧辐照下X射线光电子能谱仪的原位表征功能开发

doi: 10.16495/j.1006-3757.2023.01.006

刘建^{1, 2, 3,},
剡珍^{1, 3},
郝俊英^{1, 3},
刘维民^1, ,

1.
中国科学院兰州化学物理研究所润滑材料全国重点实验室，甘肃兰州　730000
2.
中国科学院大学，北京　100049
3.
青岛市资源化学与新材料研究中心，山东青岛　266000

基金项目: 中国科学院仪器设备功能开发技术创新项目（2023g107）

详细信息

作者简介:
刘建（1990−），男，工程师，主要从事空间润滑材料与技术研究工作，E-mail：jliu@licp.cas.cn

通讯作者:
刘维民，Tel：0931−4968166，E-mail：wmliu@licp.cas.cn

中图分类号: O657; O641; TH842
计量
- 文章访问数: 121
- HTML全文浏览量: 69
- PDF下载量: 113
- 被引次数: 0
出版历程
- 收稿日期: 2022-10-20
- 录用日期: 2023-01-03
- 修回日期: 2023-01-03
- 刊出日期: 2023-03-31

Functional Development of In-Situ Characterization of X-Ray Photoelectron Spectrometer Under Simulated Space Atomic Oxygen Irradiation

LIU Jian^{1, 2, 3
,},
YAN Zhen^{1, 3},
HAO Junying^{1, 3},
LIU Weimin^{1
, ,}

1.
State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China
2.
University of Chinese Academy of Sciences, Beijing 100049, China
3.
Qingdao Center of Resource Chemistry and New Materials, Qingdao 266000, Shandong China

Funds: Instrument and Equipment Functional Development Technology Innovation Project of Chinese Academy of Sciences (2023g107)

摘要

摘要: 对现有的X射线光电子能谱仪进行功能开发，在不改变仪器工作原理、不影响现有功能的前提下，将研制的空间交变温度原子氧辐照装置集成到其快速进样室，重点解决集群结构的匹配和性能兼容问题，实现模拟空间交变温度原子氧辐照环境下材料的原位表征功能. 采用Kapton膜的质量损失方法测试空间交变温度原子氧辐照装置的原子氧通量密度，氧气流量、偏压和微波电流均对原子氧通量密度有较大影响. 系统测试表明，原子氧辐照使WS₂薄膜表面发生了严重氧化，影响了薄膜的化学组成. 不同温度原子氧辐照导致了不可忽略的化学组成与结构的差异.
- X射线光电子能谱仪 /
- 原子氧辐照 /
- 温度交变 /
- 原位表征 /
- WS₂薄膜
Abstract: The functional development was carried out on an existing X-ray photoelectron spectrometer. The developed space alternating temperature atomic oxygen (AO) irradiation device was integrated into the fast sampling chamber without changing the operating principle and the existing functions. In-situ characterization of materials under the simulated space alternating temperature AO irradiation was realized through solving the problems of cluster structure matching and performance compatibility. The AO flux of space alternating temperature atomic oxygenirradiation device was measured using the method of mass loss of Kapton. All the oxygen flux, bias pressure and microwave current have great effects on the AO flux. The system test showed that the structure and composition of WS₂ film were changed greatly by the AO irradiation, and the difference in chemical composition and structure caused by the AO irradiation at different temperature were not negligible.
- X-ray photoelectron spectrometer /
- AO irradiation /
- alternating temperature /
- in-situ characterization /
- WS₂ film

HTML全文

图 1 原子氧源的结构与原理图

Figure 1. Structure and schematic of AO source

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图 2 空间交变温度原子氧辐照装置设计图与结构图

Figure 2. Schematic and image of space alternating temperature AO irradiation device

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图 3 模拟空间交变温度的工作原理

Figure 3. Work principle of simulating space alternating temperature

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图 4 （a）样品托、（b）样品台及（c）机械手抓取样品托照片

Figure 4. Images of (a) sample holder, (b) sample stage and (c) manipulator garbing sample holder

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图 5 XPS快速进样室及功能开发后的总体结构图

Figure 5. Images of XPS fast sampling chamber and overall structure after functional development

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图 6 Kapton膜原子氧辐照前后的照片

Figure 6. Image of Kapton before and after AO irradiation

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图 7 WS₂薄膜及不同温度下原子氧辐照后薄膜的全谱、价带谱及W、S、C、O高分辨谱

Figure 7. Survey, valence band and high resolution XPS spectra of W, S, C, O of WS₂ film and AO irradiated film at different temperatures

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表 1 不同条件下的原子氧通量密度

Table 1. Flux of AO under different conditions

影响因素	氧气流量/（mL/min）					偏压/V					微波电流/mA			温度/℃
影响因素	1	3	5	7	9	0	10	20	30	40	80	100	120	−100	20	+150
原子氧通量密度/ (×10¹⁵ atoms/cm²·s)	2.9	3.9	4.8	2.6	2.4	3.8	4.8	5.1	4.9	4.8	2.9	3.5	4.8	4.7	4.8	4.7
规律	先增大后减小，5 mL/min时存在极值					先增大后略减小，20 V时最大					微波电流越大，通量密度越大			改变温度，Kapton膜剥蚀率几乎不变

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表 2 XPS计算的WS₂薄膜元素的相对含量

Table 2. Element contents from XPS analysis of surface of as-deposited and AO irradiated WS₂ films /%

元素	原子百分含量
元素	WS₂ film	−100 ℃	20 ℃	150 ℃
W	11.48	12.76	13.26	12.32
S	20.95	7.11	5.93	6.21
C	55.06	38.06	36.62	39.32
O	12.51	42.07	44.19	42.15
S/W	1.82	0.56	0.45	0.50

下载: 导出CSV

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