Design and Application of Rapid Positioning Sample Stage for Correlative Light and Electron Microscopy

The correlative light and electron microscopy combines optical microscopy and electron microscopy analysis techniques to obtain optical and high-resolution electronic images of the sample at the same location, enabling more comprehensive and accurate sample characterization, which is widely used in multiple disciplines including materials science and optical engineering. Compared to traditional non-associative techniques, the correlative light and electron microscopy could rapidly acquire the corresponding optical images, electronic images, and spectral information of the sample at the same location. Therefore, an correlative light and electron microscopy sample stage with fast localization was prepared by micro-nanofabrication technology, and combined with energy spectrum localization system to realize multi-dimensional and cross-scale characterization of samples in specific regions, which is of great significant to related scientific research.