Application of Back Scattered Electron Imaging Function in Scanning Electron Microscopy

The basic principle and application of the back scattered electron (BSE) images of scanning electron microscope (SEM) is described. BSE imaging combined with X-ray energy dispersive spectrum of SEM was used to study the composition changes in the micro areas of samples, so as to understand the composition and structure characteristics of samples in a short time, thus providing an effective analysis method for the phase identification.