Application of Back Scattered Electron Imaging Function in Scanning Electron Microscopy

FENG Shan-e; GAO Wei-jian

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Article Navigation > Analysis and Testing Technology and Instruments > 2015 > (1): 54-57

FENG Shan-e, GAO Wei-jian. Application of Back Scattered Electron Imaging Function in Scanning Electron Microscopy[J]. Analysis and Testing Technology and Instruments, 2015, (1): 54-57.

Citation:

FENG Shan-e, GAO Wei-jian. Application of Back Scattered Electron Imaging Function in Scanning Electron Microscopy[J]. Analysis and Testing Technology and Instruments, 2015, (1): 54-57.

FENG Shan-e, GAO Wei-jian. Application of Back Scattered Electron Imaging Function in Scanning Electron Microscopy[J]. Analysis and Testing Technology and Instruments, 2015, (1): 54-57.

Citation:

FENG Shan-e, GAO Wei-jian. Application of Back Scattered Electron Imaging Function in Scanning Electron Microscopy[J]. Analysis and Testing Technology and Instruments, 2015, (1): 54-57.

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Application of Back Scattered Electron Imaging Function in Scanning Electron Microscopy

FENG Shan-e¹,
GAO Wei-jian¹

Analysis and Testing Center, Soochow University, Suzhou 215123, China

Received Date: 2014-12-02
Rev Recd Date: 2015-01-12
Publish Date: 2015-04-04

Abstract

Abstract

The basic principle and application of the back scattered electron (BSE) images of scanning electron microscope (SEM) is described. BSE imaging combined with X-ray energy dispersive spectrum of SEM was used to study the composition changes in the micro areas of samples, so as to understand the composition and structure characteristics of samples in a short time, thus providing an effective analysis method for the phase identification.
- scanning electronic microscopy,
- backscattered electron image,
- composition contrast