Abstract: The charge compensation plays an important role in the X-ray photoelectron spectroscopy (XPS) analysis for the insulating sample. According to the different X-ray sources used in XPS, the magnetic lens had different effect on the charge compensation for the insulating sample PET. The results showed that, magnetic lens has no obvious effect on the charge compensation when using a monochromatic Al Kα X-ray Source. When a non-monochromatic dual anode Mg Kα X-ray Source is used, good results in the use of magnetic lens are obtained.