廖奕鸥, 冯辉, 张重远. 激光共聚焦显微镜测量表面粗糙度的探究[J]. 分析测试技术与仪器, 2023, 29(2): 203-208. DOI: 10.16495/j.1006-3757.2023.02.010
引用本文: 廖奕鸥, 冯辉, 张重远. 激光共聚焦显微镜测量表面粗糙度的探究[J]. 分析测试技术与仪器, 2023, 29(2): 203-208. DOI: 10.16495/j.1006-3757.2023.02.010
LIAO Yiou, FENG Hui, ZHANG Zhongyuan. Research on Measuring Surface Roughness with Laser Confocal Microscope[J]. Analysis and Testing Technology and Instruments, 2023, 29(2): 203-208. DOI: 10.16495/j.1006-3757.2023.02.010
Citation: LIAO Yiou, FENG Hui, ZHANG Zhongyuan. Research on Measuring Surface Roughness with Laser Confocal Microscope[J]. Analysis and Testing Technology and Instruments, 2023, 29(2): 203-208. DOI: 10.16495/j.1006-3757.2023.02.010

激光共聚焦显微镜测量表面粗糙度的探究

Research on Measuring Surface Roughness with Laser Confocal Microscope

  • 摘要: 介绍了利用激光共聚焦显微镜对不同粗糙度标准样块表面进行粗糙度测量时,各试验参数对测量结果的影响. 对于标准样块,测得的面粗糙度(Sa)符合测量要求(示值误差≤5%),最终确定合理的试验参数. 方法不但具有非接触、高分辨率、测量速度快的特点,同时可以获得被测表面的三维形貌,可以更加直观的对表面进行评价,使激光共聚焦显微镜能够更好的应用于工业材料表面轮廓分析领域.

     

    Abstract: The effect of experimental parameters on the measurement results, using a laser confocal microscope for the roughness measurement on the surface of different roughness standard sample blocks, was introduced. For the standard sample block, the measured surface roughness Sa met the measurement requirements (indication error≤5%), and the reasonable experimental parameters were finally determined. The method not only has the characteristics of non-contact, high resolution and fast measurement speed, but also can obtain the three-dimensional topography of the measured surface, which can more intuitive to evaluate the surface, so that the laser confocal microscope can be applied more favorably in the field of industrial materials profile analysis.

     

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