激光共聚焦显微镜测量表面粗糙度的探究

廖奕鸥; 冯辉; 张重远

doi:10.16495/j.1006-3757.2023.02.010

激光共聚焦显微镜测量表面粗糙度的探究

doi: 10.16495/j.1006-3757.2023.02.010

中国科学院金属研究所分析测试中心，辽宁沈阳　110016

详细信息

作者简介:
廖奕鸥（1994−），女，本科，主要从事材料表面形貌分析工作，E-mail：liaoyiou@imr.ac.cn

中图分类号: O65
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- 文章访问数: 52
- HTML全文浏览量: 14
- PDF下载量: 13
- 被引次数: 0
出版历程
- 收稿日期: 2023-03-13
- 录用日期: 2023-05-12
- 修回日期: 2023-05-12
- 刊出日期: 2023-06-30

Research on Measuring Surface Roughness with Laser Confocal Microscope

Analysis and Testing Center, Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China

摘要

摘要: 介绍了利用激光共聚焦显微镜对不同粗糙度标准样块表面进行粗糙度测量时，各试验参数对测量结果的影响. 对于标准样块，测得的面粗糙度（Sa）符合测量要求（示值误差≤5%），最终确定合理的试验参数. 方法不但具有非接触、高分辨率、测量速度快的特点，同时可以获得被测表面的三维形貌，可以更加直观的对表面进行评价，使激光共聚焦显微镜能够更好的应用于工业材料表面轮廓分析领域.
- 激光共聚焦显微镜 /
- 非接触 /
- 三维形貌 /
- 面粗糙度
Abstract: The effect of experimental parameters on the measurement results, using a laser confocal microscope for the roughness measurement on the surface of different roughness standard sample blocks, was introduced. For the standard sample block, the measured surface roughness Sa met the measurement requirements (indication error≤5%), and the reasonable experimental parameters were finally determined. The method not only has the characteristics of non-contact, high resolution and fast measurement speed, but also can obtain the three-dimensional topography of the measured surface, which can more intuitive to evaluate the surface, so that the laser confocal microscope can be applied more favorably in the field of industrial materials profile analysis.
- laser confocal microscope /
- non-contact /
- three-dimensional topography /
- surface roughness

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图 1 激光共聚焦显微镜工作原理

Figure 1. Working principle of laser confocal microscope

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图 2 6种不同粗糙度的标准样块

(a) 编号120028，(b) 编号120054，(c) 编号112494，(d) 编号112454，(e) 编号110768，(f) 编号112421

Figure 2. Surface macromorphology of six standard sample blocks with different roughness

(a) No.120028, (b) No.120054, (c) No.112494, (d) No.112445, (e) No.110768, (f) No.112421

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图 3 标准样块（编号为112454）的二维曲线图

Figure 3. 2D curve of standard sample block (No. 112454)

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图 4 6种标准样块三维形貌

（a）编号120028，（b）编号120054，（c）编号112494，（d）编号112454，（e）编号110768，（f）编号112421

Figure 4. Three dimensional morphology of six standard sample blocks

(a) No.120028, (b) No.120054, (c) No.112494, (d) No.112454, (e) No.110768, (f) No.112421

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表 1 6种不同粗糙度的标准样块在不同物镜下测量Sa值

Table 1. Measured Sa values of six standard sample blocks with different roughness under different objective lenses /μm

物镜大小	标准样块编号
物镜大小	120028	120054	112494	112454	110768	112421
5X（29.3）	1.879	2.951	2.488	1.862	3.898	11.229
10X（30.1）	0.527	0.656	0.864	1.783	1.924	4.098
20X（30.1）	0.174	0.321	0.544	0.836	1.442	2.968
50X（46.6）	0.108	0.215	0.422	0.715	0.909	2.470
100X（83.6）	0.062	0.129	0.230	0.324	0.581	1.495
校准值	0.096	0.214	0.440	0.854	1.465	3.072

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表 2 50X物镜下3种不同粗糙度的标准样块不同步进参数下测量Sa值

Table 2. Measured Sa values of three standard sample blocks with different roughness using asynchronous advancing parameters under 50X objective lens

No. 120028			No. 120054			No. 112494
步长 /μm	Sa/μm	扫描时间/s	步长 /μm	Sa/μm	扫描时间/s	步长/μm	Sa/μm	扫描时间/s
0.100	0.110	371	0.200	0.215	245	0.500	0.422	38
0.050	0.108	733	0.100	0.215	520	0.200	0.422	103
0.020	0.111	1 742	0.050	0.216	1 013	0.100	0.426	200
0.010	0.125	2 515	0.020	0.218	2 398	0.050	0.427	405
注：图像扫描像素为512×512，扫描范围为120 μm×120 μm

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表 3 20X物镜下3种不同粗糙度的标准样块不同步进参数下测量Sa值

Table 3. Measured Sa values of three standard sample blocks with different roughness using asynchronous advancing parameters under 20X objective lens

No.112454			No.110768			No.112421
步长/μm	Sa/μm	扫描时间/s	步长/μm	Sa/μm	扫描时间/s	步长/μm	Sa/μm	扫描时间/s
1.000	0.828	51	1.500	1.447	55	3.000	2. 872	28
0.500	0.836	103	1.000	1.442	75	1.500	2.968	59
0.200	0.839	254	0.500	1.440	149	1.000	2.962	78
0.100	0.841	510	0.200	1.450	408″	0.500	2. 964	212
注：图像扫描像素为512×512，扫描范围为300 μm×300 μm

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表 4 编号112454标准样块重复性试验测量Sa值

Table 4. Repeatability test measurement Sa value of standard sample block No.112454

测试次数/次	Sa/μm	RSD/%
1	0.836	−0.119
2	0.834	−0.358
3	0.839	0.239
4	0.836	−0.119
5	0.835	−0.239
6	0.840	0.358
7	0.841	0.478
8	0.836	−0.119
9	0.839	0.239
10	0.834	−0.358
平均值	0.837	0.000 2

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