自补偿型双摆式干涉仪的设计

石磊; 孙长库; 夏恒新; 李岩松

doi:10.16495/j.1006-3757.2023.03.009

自补偿型双摆式干涉仪的设计

doi: 10.16495/j.1006-3757.2023.03.009

石磊^{1, 2,},
孙长库¹,
夏恒新²,
李岩松²

1.
天津大学精密仪器与光电子工程学院，天津　300072
2.
天津捷强动力装备股份有限公司，天津　300400

基金项目: 天津市领军培育项目课题（22YDPYGX00190）

详细信息

作者简介:
石磊（1986−），男，博士，主要从事光谱仪器方面研究，E-mail：998sl@sina.com

中图分类号: O657. 33; TH744. 3
计量
- 文章访问数: 44
- HTML全文浏览量: 29
- PDF下载量: 2
- 被引次数: 0
出版历程
- 收稿日期: 2023-06-12
- 录用日期: 2023-08-08
- 修回日期: 2023-08-08
- 刊出日期: 2023-09-25

Design of Self-Compensating Interferometer Based on Pendulum Movable Mirror

1.
School of Precision Instrument and Opto-electronics Engineering, Tianjin University, Tianjin 300072, China
2.
Tianjin Jie Qiang Equipment ltd.， Tianjin 300400, China

Funds: Tianjin Leading Cultivation Project, Research on Infrared Interferometer (22YDPYGX00190)

摘要

摘要: 受自身体积、重量、抗震性能等方面的限制，傅里叶变换红外光谱仪（FTIR）难以在工业现场的应用中取得很好的效果. 在充分利用立体角镜与平面折返镜各自光学特性的基础上，设计了一种自补偿型的双摆式干涉仪，在光学原理上解决干涉仪稳定性的问题. 通过对扫描机构的电力学分析与建模，建立了控制器与扫描速度之间的关系，并利用高速数字信号处理（DSP）技术实现相应的控制算法，能够将速度误差控制在±0.2%的范围内. 通过对仪器性能及标准样品的测试表明，仪器具有较高的信噪比与稳定性，能够满足工业应用的需求.
- 干涉仪 /
- 双摆式动镜 /
- 仪器设计 /
- 傅里叶变换红外光谱仪
Abstract: The Fourier transform infrared spectrometer (FTIR) is difficult to achieve good results in industrial field applications due to the limitations of its own volume, weight, and shock resistance. On the basis of fully utilizing the respective optical characteristics of the cube-corner mirror and the planar mirror, a self-compensating double-pendulum interferometer was designed to solve the problem of the stability of the interferometer. Through the electrical analysis and modeling of the scanning mechanism, the relationship between the controller and the scanning speed was established, and the corresponding control algorithm was realized by using high-speed digital signal processing (DSP) technology, which can control the speed error in the range of ±0.2%. The test of the instrument performance and the test of the standard sample showed that the instrument has a high signal-to-noise ratio and stability, which can meet the needs of industrial applications.
- interferometer /
- movable mirror scanning system /
- instrument design /
- FTIR

HTML全文

图 1 干涉仪的基本结构图

Figure 1. Diagram of basic structure of interferometer

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图 2 立体角镜的（A）倾斜与（B）横移

Figure 2. (A) Tilt and (B) shift of cube corner mirror

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图 3 动镜扫描系统的机械结构图

Figure 3. Mechanical diagram of moving mirror scanning system

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图 4 弹性簧片枢轴的模型

Figure 4. Model of flex cross-spring pivot

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图 5 动镜系统模糊控制算法^[12]

Figure 5. Basic principle block diagram of fuzzy control^[12]

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图 6 速度稳定性

Figure 6. Velocity stability of driver

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图 7 （A）光谱范围和（B）信噪比测试

Figure 7. (A) Spectrum range and (B) test of signal to noise ratio

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图 8 气体分析仪实物图

Figure 8. Image of gas analyzer

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图 9 （A）不同浓度下的SO₂气体的吸收光谱，（B）浓度与吸光度面积的线性拟合

Figure 9. (A) Absorption spectra of SO₂ gas at different concentrations, (B) linear fit of concentration and absorbance area

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参考文献(12)

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