JEOL JSM-35C型扫描电子显微镜故障及排除

张文德; 李煊; 陆敏

张文德, 李煊, 陆敏. JEOL JSM-35C型扫描电子显微镜故障及排除[J]. 分析测试技术与仪器, 2003, (1): 53-58.

引用本文:

张文德, 李煊, 陆敏. JEOL JSM-35C型扫描电子显微镜故障及排除[J]. 分析测试技术与仪器, 2003, (1): 53-58.

ZHANG Wen-de, LI Xuan, LU Min. Faults Study and it Solution of JEOL JSM-35C Scanning Microscope[J]. Analysis and Testing Technology and Instruments, 2003, (1): 53-58.

Citation:

ZHANG Wen-de, LI Xuan, LU Min. Faults Study and it Solution of JEOL JSM-35C Scanning Microscope[J]. Analysis and Testing Technology and Instruments, 2003, (1): 53-58.

JEOL JSM-35C型扫描电子显微镜故障及排除

Faults Study and it Solution of JEOL JSM-35C Scanning Microscope

摘要

摘要: 在介绍真空系统联锁控制流程图的基础上,选择了粗真空系统抽力变差、进样系统泄漏、真空联锁保护电路误动作、二次电子检测高压电路故障、二次电子检测电路故障、倍率放大器故障和图象放大倍率校正等七个有代表性的、已排除的故障实例进行深入分析研究,提出排除故障的思路和办法.

Abstract: The diagram of vacuum control is introduced. Typical faults occurred are analyzed and Studied thoroughly. Ideas to resolve these faults are given.

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