扫码关注我们

留言板

尊敬的读者、作者、审稿人, 关于本刊的投稿、审稿、编辑和出版的任何问题, 您可以本页添加留言。我们将尽快给您答复。谢谢您的支持!

姓名
邮箱
手机号码
标题
留言内容
验证码

导电环氧树脂消除扫描电子显微镜图像荷电问题的原理与实践

彭宇 张之恒 安婷 钱匡亮

彭宇, 张之恒, 安婷, 钱匡亮. 导电环氧树脂消除扫描电子显微镜图像荷电问题的原理与实践[J]. 分析测试技术与仪器, 2022, 28(2): 125-131. doi: 10.16495/j.1006-3757.2022.02.003
引用本文: 彭宇, 张之恒, 安婷, 钱匡亮. 导电环氧树脂消除扫描电子显微镜图像荷电问题的原理与实践[J]. 分析测试技术与仪器, 2022, 28(2): 125-131. doi: 10.16495/j.1006-3757.2022.02.003
PENG Yu, ZHANG Zhi-heng, AN Ting, QIAN Kuang-liang. Principle and Practice of Conductive Epoxy Resin to Eliminate Charging Problem in Scanning Electron Microscope Images[J]. Analysis and Testing Technology and Instruments, 2022, 28(2): 125-131. doi: 10.16495/j.1006-3757.2022.02.003
Citation: PENG Yu, ZHANG Zhi-heng, AN Ting, QIAN Kuang-liang. Principle and Practice of Conductive Epoxy Resin to Eliminate Charging Problem in Scanning Electron Microscope Images[J]. Analysis and Testing Technology and Instruments, 2022, 28(2): 125-131. doi: 10.16495/j.1006-3757.2022.02.003

导电环氧树脂消除扫描电子显微镜图像荷电问题的原理与实践

doi: 10.16495/j.1006-3757.2022.02.003
基金项目: 

中央高校基本科研业务费专项资金资助 S20220169

浙江大学实验技术研究项目 SJS202007

详细信息
    作者简介:

    彭宇(1987-),男,实验师,主要从事材料微观结构的多尺度测试与分析,E-mail: zjupengyu@zju.edu.cn

  • 中图分类号: TN16

Principle and Practice of Conductive Epoxy Resin to Eliminate Charging Problem in Scanning Electron Microscope Images

Funds: 

Fundamental Research Funds of Central Universities S20220169

Experimental Technology Research Project of Zhejiang University SJS202007

  • 摘要: 荷电问题常造成扫描电子显微镜(SEM)图像上产生亮度不均、条纹等伪影. 提出一种利用导电环氧树脂镶嵌样品以消除SEM图像荷电的方法, 并与传统导电胶粘贴制样方法对1 000 ℃高温混凝土、瓷土与河南双槐树考古土三种样品的适应性进行了对比研究. 结果表明, 利用铜粉与环氧树脂混合制备导电环氧树脂并将样品镶嵌其中所制备样品的SEM图像基本无荷电问题, 而传统导电胶粘贴方法所制备样品的SEM图像存在较严重的荷电问题, 通过增加导电层厚度并不能对此进行改善, 且易造成微纳结构被掩盖. 最后对传统制样方法导致荷电问题的原因与导电环氧树脂对荷电问题的改善原理进行了分析.
  • 图  1  传统方法制备的样品的SEM图像

    (a)(d): 高温混凝土,(b)(e): 瓷土,(c)(f): 双槐树考古土

    Figure  1.  SEM images of samples prepared by conventional method

    (a)(d): concrete exposed to high temperature, (b)(e): ceramic soil, (c)(f): archology soil of Shuanghuaishu archeological site in Henan

    图  2  利用低电压(3 kV)拍摄的传统方法制备的样品的SEM图像

    (a)(d): 高温混凝土,(b)(e): 瓷土,(c)(f): 双槐树考古土

    Figure  2.  SEM images of samples prepared by conventional method acquired at low voltage (3 kV)

    (a)(d): concrete exposed to high temperature, (b)(e): ceramic soil, (c)(f): archology soil of Shuanghuaishu archeological site in Henan

    图  3  导电环氧树脂镶嵌制备样品的SEM图像

    (a)(d): 高温混凝土,(b)(e): 瓷土,(c)(f): 河南双槐树考古土

    Figure  3.  SEM images of samples prepared by conductive epoxy resin

    (a)(d): concrete exposed to high temperature, (b)(e): ceramic soil, (c)(f): archology soil of Shuanghuaishu archeological site in Henan

    图  4  低强度疏松样品荷电问题示意图

    Figure  4.  Schematic illustration of charging problem of low strength loose structure samples

    图  5  导电环氧树脂改善SEM图像荷电问题原理示意图

    Figure  5.  Schematic illustration of principle of elimination of charging problem by conductive epoxy resin

  • [1] 李晓敏. 冷冻双束扫描电镜的开放与管理[J]. 分析测试技术与仪器, 2021, 27(1): 36-43. doi: 10.16495/j.1006-3757.2021.01.006

    LI Xiao-min. Sharing and management of dual beam (SEM/FIB) electron microscope with cryo-preparation system[J]. Analysis and Testing Technology and Instruments, 2021, 27(1): 36-43. doi: 10.16495/j.1006-3757.2021.01.006
    [2] 彭宇, 赵国荣, 王培铭, 孔亚宁, 赵丕琪. 丁苯乳胶粉在早期水泥砂浆中形成聚合物膜结构的形态[J]. 电子显微学报, 2019, 38(4): 357-363. doi: 10.3969/j.issn.1000-6281.2019.04.007

    PENG Yu, ZHAO Guo-rong, WANG Pei-ming, KONG Ya-ning, ZHAO Pi-qi. Morphology of polymer film in cement mortars modified by SBR redispersible polymer powders at early ages[J]. Journal of Chinese Electron Microscopy Society, 2019, 38(4): 357-363. doi: 10.3969/j.issn.1000-6281.2019.04.007
    [3] 冯善娥, 高伟建. 扫描电镜中背散射电子成像功能的应用[J]. 分析测试技术与仪器, 2015, 21(1): 54-57. http://www.fxcsjsyyq.net/fxcsjsyyq/article/id/20150110

    FENG Sha-ne, GAO Wei-jian. Application of back scattered electron imaging function in scanning electron microscopy[J]. Analysis and Testing Technology and Instruments, 2015, 21(1): 54-57. http://www.fxcsjsyyq.net/fxcsjsyyq/article/id/20150110
    [4] 王宇, 张斌, 马庆超, 刘艺. 场发射扫描电镜中非导电性样品制备方法[J]. 分析仪器, 2018(2): 164-166. doi: 10.3969/j.issn.1001-232x.2018.02.031

    WANG Yu, ZHANG Bin, MA Qing-chao, LIU Yi. Preparation of non-conductive sample in FESEM[J]. Analytical Instrumentation, 2018(2): 164-166. doi: 10.3969/j.issn.1001-232x.2018.02.031
    [5] 任艳军, 秦素平. 扫描电镜非最佳条件操作考察[J]. 分析测试技术与仪器, 2008, 14(1): 59-61. doi: 10.3969/j.issn.1006-3757.2008.01.014

    REN Yan-jun, QIN Su-ping. Study on scanning electron microscope working at nonoptimum observation conditions[J]. Analysis and Testing Technology and Instruments, 2008, 14(1): 59-61. doi: 10.3969/j.issn.1006-3757.2008.01.014
    [6] 华佳捷, 刘紫微, 林初城, 吴伟, 曾毅. 场发射扫描电镜中荷电现象研究[J]. 电子显微学报, 2014, 33(3): 226-232. doi: 10.3969/j.1000-6281.2014.03.006

    HUA Jia-jie, LIU Zi-wei, LIN Chu-cheng, WU Wei, ZENG Yi. Investigation on charging for field emission scanning electron microscope[J]. Journal of Chinese Electron Microscopy Society, 2014, 33(3): 226-232. doi: 10.3969/j.1000-6281.2014.03.006
    [7] 卢慧粉, 宋庆军, 曹艳芬, 孙秋香. 扫描电镜中荷电效应的分析[J]. 理化检验(物理分册), 2014, 50(1): 46-48. https://www.cnki.com.cn/Article/CJFDTOTAL-LHJW201401012.htm

    LU Hui-fen, SONG Qing-jun, CAO Yan-fen, SUN Qiu-xiang. Analysis on charged effect in scanning electron microscopy[J]. Physical Testing and Chemical Analysis (Part A: Physical Testing), 2014, 50(1): 46-48. https://www.cnki.com.cn/Article/CJFDTOTAL-LHJW201401012.htm
    [8] 阮涛, 李琼, 马彤梅, 张燕红. 场发射扫描电镜条件对几种特殊样品形貌的影响[J]. 实验技术与管理, 2020, 37(2): 50-53. https://www.cnki.com.cn/Article/CJFDTOTAL-SYJL202002013.htm

    RUAN Tao, LI Qiong, MA Tong-mei, ZHANG Yan-hong. Effect of field emission scanning electron microscopy conditions on the morphology of several special samples[J]. Experimental Technology and Management, 2020, 37(2): 50-53. https://www.cnki.com.cn/Article/CJFDTOTAL-SYJL202002013.htm
    [9] 刘恺, 密玲煜, 刘玲玲, 李洋. 不同扫描电镜制样方法观察棉花叶片气孔[J]. 生命科学研究, 2020, 24(4): 293-300. https://www.cnki.com.cn/Article/CJFDTOTAL-SMKY202004006.htm

    LIU Kai, MI Ling-yu, LIU Ling-ling, LI Yang. Different SEM sample preparation methods to observe the stomata of cotton leaves[J]. Life Science Research, 2020, 24(4): 293-300. https://www.cnki.com.cn/Article/CJFDTOTAL-SMKY202004006.htm
    [10] 曹惠. 导电性较差样品的扫描电镜优化观测条件[J]. 中国测试, 2014, 40(3): 19-22. https://www.cnki.com.cn/Article/CJFDTOTAL-SYCS201403006.htm

    CAO Hui. Optimal observation conditions of SEM image of poor conductivity sample[J]. China Measurement & Test, 2014, 40(3): 19-22. https://www.cnki.com.cn/Article/CJFDTOTAL-SYCS201403006.htm
    [11] 余凌竹, 鲁建, 吴永豪, 路姣, 孟国龙. 离子溅射喷金对陶瓷类样品扫描电镜形貌观察的影响[J]. 实验科学与技术, 2020, 18(2): 21-25. https://www.cnki.com.cn/Article/CJFDTOTAL-SYKS202002005.htm

    YU Ling-zhu, LU Jian, WU Yong-hao, LU Jiao, MENG Guo-long. Effect of Au coating by ion sputtering on SEM morphology observation of ceramic materials[J]. Experiment Science and Technology, 2020, 18(2): 21-25. https://www.cnki.com.cn/Article/CJFDTOTAL-SYKS202002005.htm
    [12] 黄顺明. 龙泉窑制瓷材料之独特性及其加工技术初探[J]. 陶瓷科学与艺术, 2020, 54(7): 4-6. https://www.cnki.com.cn/Article/CJFDTOTAL-TCGC202007003.htm

    HUANG Shun-ming. Discussion of the unique characteristics of Longquan ceramics materials and the process technology[J]. Ceramics Science & Art, 2020, 54(7): 4-6. https://www.cnki.com.cn/Article/CJFDTOTAL-TCGC202007003.htm
    [13] 张永利, 朱佳, 史册, 尚玲玲, 马瑞. 高岭土的改性及其对Cr(Ⅵ)的吸附特性[J]. 环境科学研究, 2013, 26(5): 561-568. https://www.cnki.com.cn/Article/CJFDTOTAL-HJKX201305016.htm

    ZHANG Yong-li, ZHU Jia, SHI Ce, SHANG Ling-ling, MA Rui. Modification of Kaolin and its adsorption properties on Cr(Ⅵ)[J]. Research of Environmental Sciences, 2013, 26(5): 561-568. https://www.cnki.com.cn/Article/CJFDTOTAL-HJKX201305016.htm
    [14] 李梅晔. 镀膜对FE-SEM纳米尺度形貌观察的影响[J]. 分析测试技术与仪器, 2008, 14(2): 120-124. http://www.fxcsjsyyq.net/fxcsjsyyq/article/id/20082012

    LI Mei-ye. Influence of coating on the micro topography of sample observed with FE-SEM[J]. Analysis and Testing Technology and Instruments, 2008, 14(2): 120-124. http://www.fxcsjsyyq.net/fxcsjsyyq/article/id/20082012
    [15] 王培铭, 彭宇, 刘贤萍. 聚合物改性水泥水化程度测定方法比较[J]. 硅酸盐学报, 2013, 41(8): 1116-1123. https://www.cnki.com.cn/Article/CJFDTOTAL-GXYB201308014.htm

    WANG Pei-ming, PENG Yu, LIU Xian-ping. Comparison of methods for determination of hydration degree of polymer modified cement paste[J]. Journal of the Chinese Ceramic Society, 2013, 41(8): 1116-1123. https://www.cnki.com.cn/Article/CJFDTOTAL-GXYB201308014.htm
  • 加载中
图(5)
计量
  • 文章访问数:  74
  • HTML全文浏览量:  19
  • PDF下载量:  15
  • 被引次数: 0
出版历程
  • 收稿日期:  2022-05-20
  • 修回日期:  2022-06-01
  • 网络出版日期:  2022-07-07
  • 刊出日期:  2022-06-30

目录

    /

    返回文章
    返回