Abstract: The in situ, micro-area and high-resolution spatial distribution characteristics of elements in the samples are of practical and important research significance. In biological samples, the in situ spatial distribution characteristics of elements can be used as indicators of physiological processes, reveal metabolic pathways, and reflect the ways in which environmental characteristics affect organisms. In geological samples, the in situ spatial distribution characteristics of elements can be used as a basis for mineral evaluation and an important indicator for studying the process of environmental geochemical changes. At present, several commonly used techniques for measuring the in situ distribution characteristics of elements in micro-areas include: micro X-ray fluorescence spectrometry (μXRF), synchrotron radiation technology (SR), electron microscopy-energy dispersive spectrometry (EM-EDS), electron probe technology (EP), laser ablation-inductively coupled plasma mass spectrometry (LA-ICP-MS), laser induced breakdown plasma emission spectroscopy (LIBS), etc. Based on the principle of testing samples, these technologies differ in many aspects such as non-destructive testing, quantitative testing, suitable sample type and size, complexity of pre-treatment methods, detection limits and resolution, and so on. The current mainstream of the micro-area in situ element distribution detection techniques were introduced and summarized, the advantages and disadvantages of various techniques and their applicable sample types and application ranges were analyzed and compared. The selection of standard samples, data calibration and processing and visualization into maps were discussed for the first time, which provides a technical reference for related scientific research and analysis work.