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王大庆, 于冰, 王超. 一种简易扩散泵封闭式加热器[J]. 分析测试技术与仪器, 1997, (2): 76-79.
引用本文: 王大庆, 于冰, 王超. 一种简易扩散泵封闭式加热器[J]. 分析测试技术与仪器, 1997, (2): 76-79.
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Wang Daqing, Yu Bing, Wang Chao. A Type of Simple Enclosed Heat Booster of Diffusion Pump[J]. Analysis and Testing Technology and Instruments, 1997, (2): 76-79.
Citation: Wang Daqing, Yu Bing, Wang Chao. A Type of Simple Enclosed Heat Booster of Diffusion Pump[J]. Analysis and Testing Technology and Instruments, 1997, (2): 76-79.
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一种简易扩散泵封闭式加热器

A Type of Simple Enclosed Heat Booster of Diffusion Pump

    摘要
  • 摘要: 介绍了一种用于电镜扩散泵(DP)的封闭式加热器,它具有结构简单、安装及检修方便,成本低廉等特点.该装置适应于JEM-200CX电镜及JEE-4X真空喷镀仪配置,近年来的使用证明该装置完全可以替代原装进口封闭式加热器.

     

    Abstract: Introduced the development of the enclosed heat booster of diffusion pump using for TEM. The heat booster is characterized by its simplicity, convenience and lower cost. It's suitable for JEM-200CX TEM and JEE-4X Vacuum Evaporator. The application results show that it can completely take the place of the imported enclosed heat booster with original packaging.

     

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