Abstract: s A comprehensive review about the application of Microelectronics Machine System (MEMS) in physical and chemical analysis is given,including MEMS's basic concept,briefhistory and main features.It is indicated that the application of MEMS in physical and chemical analysis gives rise to miniaturization of the instruments,improves their properties and,at same time,reduces the cost of instruments and experiments.Finally,the support technologies of micro analysis instruments are simply introduced.