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陆敏, 张文德, 李煊. Digisorb 2600型物理吸附仪真空系统检漏、故障分析及对策[J]. 分析测试技术与仪器, 1998, (4): 250-254.
引用本文: 陆敏, 张文德, 李煊. Digisorb 2600型物理吸附仪真空系统检漏、故障分析及对策[J]. 分析测试技术与仪器, 1998, (4): 250-254.
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Lu Min Zhang, Wende Li Xuan, . Leak-ChecK, Fault Analysis and Countermeasure of Digisorb 2600 Vacuum System[J]. Analysis and Testing Technology and Instruments, 1998, (4): 250-254.
Citation: Lu Min Zhang, Wende Li Xuan, . Leak-ChecK, Fault Analysis and Countermeasure of Digisorb 2600 Vacuum System[J]. Analysis and Testing Technology and Instruments, 1998, (4): 250-254.
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Digisorb 2600型物理吸附仪真空系统检漏、故障分析及对策

Leak-ChecK, Fault Analysis and Countermeasure of Digisorb 2600 Vacuum System

    摘要
  • 摘要: 就Digisorb2600型物理吸附仪的真空系统拟出了表格形式的基本检漏步骤,并在此基础上详细介绍了几例特殊真空故障的查找、分析及解决方法.

     

    Abstract: The digisorb 2600 vacuum system is introduced briefly, the table of leak-check procedure of each value is made. Based on the table, several particular vacuum faults are analyzed and studied deeply, and the methods to resolve these faults are given.

     

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