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李成基, 李韫言, 商广义. 扫描电子显微镜与扫描隧道显微镜联用装置[J]. 分析测试技术与仪器, 1999, (1): 5-8.
引用本文: 李成基, 李韫言, 商广义. 扫描电子显微镜与扫描隧道显微镜联用装置[J]. 分析测试技术与仪器, 1999, (1): 5-8.
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LI Chengji, LI Yunyan, SHANG Guangyi. Scanning Tunnelling Microscope Combined with Scanning Electron Microscope[J]. Analysis and Testing Technology and Instruments, 1999, (1): 5-8.
Citation: LI Chengji, LI Yunyan, SHANG Guangyi. Scanning Tunnelling Microscope Combined with Scanning Electron Microscope[J]. Analysis and Testing Technology and Instruments, 1999, (1): 5-8.
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扫描电子显微镜与扫描隧道显微镜联用装置

Scanning Tunnelling Microscope Combined with Scanning Electron Microscope

    摘要
  • 摘要: 在KYKY-1000B型扫描电子显微镜(SEM)上所开发的与其联用的袖珍型扫描隧道显微镜(STM)主要有四个部分:(1)减震阻尼装置,(2)隧道探针,(3)探针扫描与逼近装置,(4)电子控制与图象采集系统。它的分辨率约为1nm.并用它观察了半导体光栅与硅上金膜的细微结构。

     

    Abstract: A pocket scanning tunnelling microscope(STM) has beenbuilt on a KYKY-1000B scanning electron microscope(SEM). It consists of (1) a vibration-reduced system. (2) tunnelling tip. (3) tip scanning and approch system. (4) electric control and image acquisition system. The resolution of STM is about 1 nm. The semiconductor grating and gold film have been measured with this SEM+STM combined system.

     

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