Integrated Micro-Chromatograph

An integrated micro gas chromatograph developed by using silicon micro machining technology and the principle of chromatography is introduced.The main GC parts including a micro injector,a narrow bore column and a solid state micro detector are integrated on one wafer.This gas chromatograph of only several hundred grams weight analyzes sample ten times faster than conventional GC with a detection limit of 10^-6V/V and a few watt in power consumption.The manufacture process of this instrument is similar to that of semiconductor chips so that mass production with high reproducibility and very low cost which so completely different from the produedon of conventional GC can be accommplished.The basic design of this instrument and the principle of micro-machining is descrbed,practical applications are given and the key points of the development of thes GC is also discussed.