Tree Dimension Profile Testing with Nanometer Resolution

The diffraction effect on transversal and vertical resolution was analyzed by a simulation computation for spatial invariant system. Interference way, relation of resolution with clear apertures of the system, and light source bandwidth were considered. To reduce the effect of transversal resolution on vertical resolution, a correlation information extraction, in other words, a numeral filtering method has been suggested and the surface profile of three dimension with nanomerter has also been obtained.