Lu Min Zhang, Wende Li Xuan, . Leak-ChecK, Fault Analysis and Countermeasure of Digisorb 2600 Vacuum System[J]. Analysis and Testing Technology and Instruments, 1998, (4): 250-254.
Citation:
Lu Min Zhang, Wende Li Xuan, . Leak-ChecK, Fault Analysis and Countermeasure of Digisorb 2600 Vacuum System[J]. Analysis and Testing Technology and Instruments, 1998, (4): 250-254.
Lu Min Zhang, Wende Li Xuan, . Leak-ChecK, Fault Analysis and Countermeasure of Digisorb 2600 Vacuum System[J]. Analysis and Testing Technology and Instruments, 1998, (4): 250-254.
Citation:
Lu Min Zhang, Wende Li Xuan, . Leak-ChecK, Fault Analysis and Countermeasure of Digisorb 2600 Vacuum System[J]. Analysis and Testing Technology and Instruments, 1998, (4): 250-254.
Leak-ChecK, Fault Analysis and Countermeasure of Digisorb 2600 Vacuum System
The digisorb 2600 vacuum system is introduced briefly, the table of leak-check procedure of each value is made. Based on the table, several particular vacuum faults are analyzed and studied deeply, and the methods to resolve these faults are given.
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